2-twin 2 m long wet benches located in 30m2 yellow room (Class 100) with hot plates, spin coaters, ultrasonic cleaners. The class in the wet benches is 10.
Photolitography componenets, Mask Aligner, Profilometer, are installed in the yellow room
Class 1000 room includes drys etching instruments (Focused Iopn Beam/E-beam lithography), SEM with EDS detector, Wire Bonder, Thermal Evaporator.
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